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S> ### $Id: Semi2.St,v 1.1 1999/10/13 00:50:09 saikat Exp $S> ### Analysis of the Oxide layer thickness data given as data set 4.4 inS> ### "SAS System for Mixed Models"S> options(contrasts = c(factor = "contr.SAS", ordered = "contr.poly"))S> formula(Semi2)Thickness ~ 1 | Lot/WaferS> plot(Semi2)S> fm1Semi2 <- lme( Thickness ~ 1, data = Semi2,+ random = ~ 1 | Lot/Wafer, method = "ML" )S> summary( fm1Semi2 )Linear mixed-effects model fit by maximum likelihoodData: Semi2AIC BIC logLik466.68 475.78 -229.34Random effects:Formula: ~ 1 | Lot(Intercept)StdDev: 10.583Formula: ~ 1 | Wafer %in% Lot(Intercept) ResidualStdDev: 5.9888 3.5453Fixed effects: Thickness ~ 1Value Std.Error DF t-value p-value(Intercept) 2000.2 3.9862 48 501.77 <.0001Standardized Within-Group Residuals:Min Q1 Med Q3 Max-1.8688 -0.49906 0.10125 0.54825 1.798Number of Observations: 72Number of Groups:Lot Wafer %in% Lot8 24S> fm1RSemi2 <- update( fm1Semi2, method = "REML" )S> summary( fm1RSemi2 ) # compare with output 4.13, p. 156Linear mixed-effects model fit by REMLData: Semi2AIC BIC logLik462.02 471.07 -227.01Random effects:Formula: ~ 1 | Lot(Intercept)StdDev: 11.398Formula: ~ 1 | Wafer %in% Lot(Intercept) ResidualStdDev: 5.9888 3.5453Fixed effects: Thickness ~ 1Value Std.Error DF t-value p-value(Intercept) 2000.2 4.2317 48 472.66 <.0001Standardized Within-Group Residuals:Min Q1 Med Q3 Max-1.8746 -0.49908 0.10465 0.55102 1.7922Number of Observations: 72Number of Groups:Lot Wafer %in% Lot8 24S> fm2Semi2 <- update( fm1Semi2, Thickness ~ Source )S> anova( fm1Semi2, fm2Semi2 )Model df AIC BIC logLik Test L.Ratio p-valuefm1Semi2 1 4 466.68 475.78 -229.34fm2Semi2 2 5 466.86 478.25 -228.43 1 vs 2 1.813 0.1782S> ## Again, the p-value is smaller than that for the F test.S> fm2RSemi2 <- update( fm2Semi2, method = "REML" )S> summary( fm2RSemi2 ) # compare with output 4.15, p. 159Linear mixed-effects model fit by REMLData: Semi2AIC BIC logLik456.48 467.72 -223.24Random effects:Formula: ~ 1 | Lot(Intercept)StdDev: 10.95Formula: ~ 1 | Wafer %in% Lot(Intercept) ResidualStdDev: 5.9888 3.5453Fixed effects: Thickness ~ SourceValue Std.Error DF t-value p-value(Intercept) 2005.2 5.7716 48 347.43 <.0001Source -10.1 8.1622 6 -1.24 0.2629Correlation:(Intr)Source -0.707Standardized Within-Group Residuals:Min Q1 Med Q3 Max-1.8864 -0.51397 0.11776 0.53466 1.7804Number of Observations: 72Number of Groups:Lot Wafer %in% Lot8 24S> fm3Semi2 <- update( fm2Semi2,+ random = list(Lot = pdDiag( ~ Source - 1 ), Wafer = ~ 1 ) )S> summary( fm3Semi2 )Linear mixed-effects model fit by maximum likelihoodData: Semi2AIC BIC logLik465.24 478.9 -226.62Random effects:Formula: ~ Source - 1 | LotStructure: DiagonalSource1 Source2StdDev: 3.0745 12.794Formula: ~ 1 | Wafer %in% Lot(Intercept) ResidualStdDev: 5.9891 3.5454Fixed effects: Thickness ~ SourceValue Std.Error DF t-value p-value(Intercept) 2005.2 6.7474 48 297.18 <.0001Source -10.1 7.1688 6 -1.41 0.2092Correlation:(Intr)Source -0.941Standardized Within-Group Residuals:Min Q1 Med Q3 Max-1.8936 -0.55242 0.079282 0.575 1.7732Number of Observations: 72Number of Groups:Lot Wafer %in% Lot8 24S> fm3RSemi2 <- update( fm3Semi2, method = "REML" )S> summary( fm3RSemi2 ) # compare with output 4.17, p. 163Linear mixed-effects model fit by REMLData: Semi2AIC BIC logLik455.76 469.25 -221.88Random effects:Formula: ~ Source - 1 | LotStructure: DiagonalSource1 Source2StdDev: 4.1318 14.923Formula: ~ 1 | Wafer %in% Lot(Intercept) ResidualStdDev: 5.9889 3.5453Fixed effects: Thickness ~ SourceValue Std.Error DF t-value p-value(Intercept) 2005.2 7.6821 48 261.02 <.0001Source -10.1 8.1622 6 -1.24 0.2629Correlation:(Intr)Source -0.941Standardized Within-Group Residuals:Min Q1 Med Q3 Max-1.8991 -0.53091 0.081684 0.55722 1.7677Number of Observations: 72Number of Groups:Lot Wafer %in% Lot8 24S> anova( fm1Semi2, fm2Semi2, fm3Semi2 )Model df AIC BIC logLik Test L.Ratio p-valuefm1Semi2 1 4 466.68 475.78 -229.34fm2Semi2 2 5 466.86 478.25 -228.43 1 vs 2 1.8130 0.1782fm3Semi2 3 6 465.24 478.90 -226.62 2 vs 3 3.6197 0.0571